Since the demise of the EcoEnergy program, there are no federal rebate programs. Provincial programs exist in some provinces. Here is a link to provincial programs from the Canadian Solar Industries Association
For industrial customers, there is an accelerated capital cost allowance:
For Ontario, any power produced by a residential or small commercial PV system of less than 10 kW DC will be purchased at 38.4 cents/kwh. There is a lot of talk these days regarding whether to use the MicroFIT program or just to net meter your solar. The smaller the system, the more net metering makes sense because the fixed cost of the extra electrical meter and equipment to meet the MicroFIT rules becomes prohibitive. Net metering is much less expensive and does not require a double meter base. The savings can be $2000+ for a system.